Global semiconductor manufacturing is facing a crisis triggered by refrigerant shutdowns

Semiconductors are closely related to our lives. They are the basic core components of smart phones, computers, communication base stations, data centers, electrical appliances, power stations, substations, trains, airplanes, ATMs and other equipment. It is no exaggeration to say that without semiconductors, modern life and work would not be possible, and even human civilization would not be possible.

Now, the semiconductor industry faces a crisis that could lead to a halt in semiconductor production in 2026. The US 3M Company, which has a global market share of 80%, announced that it will stop producing refrigerants for dry etching equipment - "polyfluoroalkyl substances" (PFAS for short), including perfluorohexane (Fluorinert) and PFAS by the end of 2025. Fluorohexanone (Novec) electronic fluorinated fluid. These refrigerants are used in the dry etching process used in chip manufacturing: heat from the plasma flows into the wafer, but if the temperature is not controlled, the wafer temperature rises and the etch fluctuates. The circulating refrigerant and helium in the cooler are responsible for controlling the wafer at a suitable temperature. These temperatures range from a high temperature of nearly 100°C to the coldest low temperature of -70°C. Each required temperature is different. An optimized refrigerant is needed. Although the refrigerant can be recycled, there will be a little leakage, so the PFAS refrigerant needs to be replenished regularly during the chip manufacturing process.

3M took the lead in producing perfluorohexane coolant in the 1950s, which was mainly used in military avionics equipment. In 1996, the company developed a perfluorohexanone coolant that does not contain ozone layer substances. Perfluorohexane coolant has the advantages of being transparent, colorless, odorless, non-flammable, excellent dielectric properties, high boiling point, and compatible with many materials. The disadvantage is that this liquid evaporates and stays in the atmosphere for a long time, indirectly causing global warming , and will decompose to release highly toxic perfluoroisobutane. The advantages of perfluorohexanone are high cooling efficiency, safety for electronic products and non-flammable liquids, and no harmful substance emissions, but the disadvantages are high cost and must be sealed.

Polyfluoroalkyl substances are really not a good thing for human health. They will exist forever in nature and will remain in soil, water and human body. If you are exposed to this kind of thing for a long time, you will get various cancers. 3M is currently dealing with numerous pollution lawsuits caused by PFAS, facing a claim of 300 million US dollars, and the company's PFAS business only generates about 10 million US dollars in sales per quarter. Therefore, 3M has decided to stop the production of polyfluoroalkyl substances . However, many semiconductor manufacturers rely heavily on this substance, and their inventories are typically only three months old. If 3M stopped making this stuff, there would be a big problem: Semiconductor factories couldn't get replacement refrigerants, and their dry etch equipment wouldn't work, which would mean a shutdown.

Currently, semiconductor manufacturers are scrambling to buy PFAS refrigerants. Since the beginning of last year, the price of semiconductor refrigerants has been rising. Other chemical companies hope to develop a new refrigerant and apply for approval to build a chemical plant within three years, but time is clearly tight.